|
|
| Brand Name: | Mingseal |
| Model Number: | SS101 |
| MOQ: | 1 |
| Price: | $28000-$150000 / pcs |
| Delivery Time: | 5-60 Days |
| Payment Terms: | L/C,D/A,D/P,T/T,Western Union |
| SS101 Wafer Level Dispensing Machine | Specifications |
|---|---|
| Application Range | Wafer Configuration | φ200±0.5mm/φ300±0.5mm (Standard version supports 12-inch only) |
| Wafer Thickness | 300~25500 μm |
| Max. Acceptable Wafer Warp | 5mm (subject to Finger model selection) |
| Max. Wafer Weight | 600g (subject to Finger model selection) |
| Supported Wafer-box Type | 8-inch Open Cassette/ 12-inch Foup (Standard version supports 12-inch only) |
| PC101 (EFEM) | Loading & Unloading Method | Landport +Robot Arm |
| Pre-Aligner Precision | Circle center correction deviation ≤ ±0.1 mm Angle correction deviation ≤ ±0.2° |
| Wafer Reader | Supporting SEMI fonts (flat or embossed surfaces), non-SEMI fonts |
| Jetting System | Transmission System | X/Y: Linear motor Z: Servo motor&Screw module |
| Repeatability (3sigma) | X/Y:±3 μm Z:±5 μm |
| Positioning Accuracy (3sigma) | X/Y:±10 μm |
| Max. Speed | X/Y:1000mm/s Z: 500mm/s |
| Max. Acceleration | X/Y:1g Z: 0.5g |
| Visual System | Pixel | 130W |
| Identify Accuracy | ±1pixel |
| Identify Range | 10*12mm |
| Light Resource | Red, Green, White combined light + extra red illumination |
| Chuck Table | Vacuum Suction Planeness Deviation | ≤30 μm |
| Heating Temperature Deviation | ±1.5℃ |
| Lifting height repeatability | ±10 μm |
| Vacuum Suction Pressure | -85~-70KPa (Settable) |
| General Condition | Footprint W* D * H | 3075*2200*2200mm (Display screen unfold) |
| Operation Environment Temperature | 23℃±3℃ |
| Operation Environment Humidity | 30-70% |
